PENGARUH TEMPERATUR ANNEALING TERHADAP SIFAT OPTIK LAPISAN TIPIS TIN DIOXIDE (SnO2)

Abstract

Abstrak

Penelitian ini dilaksanakan untuk mendiskripsikan pengaruh temperatur annealing terhadap sifat optik  lapisan tipis SnO₂ . Deposisi lapisan tipis dilakukan dengan teknik spin coating pada substrat kaca dengan 3 variasi kecepatan putar 1500 rpm, 2000 rpm, 2500 rpm, dan temperatur annealing 100°C, 150°C dan 200°C. Pengukuran ketebalan lapisan tipis SnO₂ dilakukan menggunakan Ellipsometer SpecEI-2000, dimana setiap  bertambahnya temperatur annealing, ketebalan lapisan tipis akan semakin berkurang (semakin tipis). Yang  memiliki rentang ketebalan 83.8 nm dan 79.5 nm. Nilai indeks bias pada temperatur annealing 100°C, 150°C dan 200°C  kecepatan putar 2000 rpm secara berurutan adalah 1.90, 1.80 dan 1.86.  Uji Spektrofotometri UV-Vis menunjukkan nilai transmitansi berbanding terbalik dengan nilai absorbsi. Transmitansi maksimal 88% pada temperatur annealing 150°C  panjang gelombang 300 nm. Struktur permukaan lapisan tipis dari hasil SEM menunjukkan bahwa semakin tinggi temperatur pemanasan terjadi pengumpalan atau aglomerasi dan beberapa kekosongan lapisan SnO₂ akibat penguapan. Karena semakin bertambanya temperatur annealing menyebabkan lapisan tipis SnO₂  semakin kering dan cepat mengelupas.

Kata Kunci               : Temperatur Annealing , SnO₂, sifat optik

Abstract

Research carried out is this “skripsi” is to know and and analyzed the effect of temperatur annealing for optical properties of SnO₂ thin film. SnO₂ thin films were deposited on glass substrates by using Spin Coating technique with rotation speed 1500 rpm, 2000 rpm and 2500 rpm on heating temperature 100°C, 150°C and 200°C. Measurement of thickness by Ellipsometer SpecEI-200 were analyzed that increasing heating temperature the thickness of thin films are decreasing. Namely at annealing temperature 100 ° C - 200 ° C at a rotational speed of 1500 rpm 83.8, 82.5, 80.9, at 2000 rpm 83.6, 83.3, 80.0 nm rotational speed and at 2500 rpm rotational density 83.3, 82.4, 79.5 nm. Refractive index , at annealing temperature 100°C, 150°C and  200°C is 1.90,1.80, 1.86 . UV-Vis spectrophotometry test showed that the value of transmittance is inversely proportional to its absorbsity value. With maximum transmittance of 88% at annealing temperature of 150 °C at 300 nm wavelength. Surface structural of thin film showed  increasing annealing temperature were clumping or agglomeration and vacuum of SnO₂ coating due to evaporation when heated. Due to the increasing temperature of the heating will cause the thin layer of SnO₂ will be dry and quickly peel.

Keywords : Annealing Temperature, SnO₂, Optical Properties